Metrology, Inspection, and Process Control for Microlithography: XIII (Proceedings of SPIE) - Singh - Books - SPIE Press - 9780819431516 - June 30, 1999
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Metrology, Inspection, and Process Control for Microlithography: XIII (Proceedings of SPIE)

Singh

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Metrology, Inspection, and Process Control for Microlithography: XIII (Proceedings of SPIE)

1052 pages, illustrations

Media Books     Paperback Book   (Book with soft cover and glued back)
Released June 30, 1999
ISBN13 9780819431516
Publishers SPIE Press
Pages 1052
Dimensions 1.74 kg   (Weight (estimated))
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