Microlithography: Science and Technology - Bruce W. Smith - Books - Taylor & Francis Inc - 9781439876756 - May 20, 2020
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Bruce W. Smith
Microlithography: Science and Technology 3rd edition

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Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.

900 pages, 570 black & white illustrations, 40 black & white tables

Media Books     Hardcover Book   (Book with hard spine and cover)
Released May 20, 2020
ISBN13 9781439876756
Publishers Taylor & Francis Inc
Pages 838
Dimensions 150 × 220 × 20 mm   ·   1.62 kg
Language English  
Editor Smith, Bruce W.
Editor Suzuki, Kazuaki

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