Semiconductor Lithography: Principles, Practices, and Materials - Microdevices - Wayne M. Moreau - Books - Springer-Verlag New York Inc. - 9781461282280 - February 22, 2012
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Wayne M. Moreau
Semiconductor Lithography: Principles, Practices, and Materials - Microdevices Softcover reprint of the original 1st ed. 1988 edition

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In fabricating a semiconductor device such as a transistor, a series of hot processes consisting of vacuum film deposition, oxidations, and dopant implantation are all patterned into microscopic circuits by the wet processes of lithography.

952 pages, black & white illustrations

Media Books     Paperback Book   (Book with soft cover and glued back)
Released February 22, 2012
ISBN13 9781461282280
Publishers Springer-Verlag New York Inc.
Pages 952
Dimensions 170 × 244 × 48 mm   ·   1.48 kg
Language English  

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