Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems - Michael Huff - Books - Springer Nature Switzerland AG - 9783030405588 - April 10, 2020
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Michael Huff
Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems 2020 edition

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This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps.

521 pages, 24 Illustrations, color; 212 Illustrations, black and white; XIX, 521 p. 236 illus., 24 i

Media Books     Hardcover Book   (Book with hard spine and cover)
Released April 10, 2020
ISBN13 9783030405588
Publishers Springer Nature Switzerland AG
Pages 521
Dimensions 150 × 220 × 20 mm   ·   934 g
Language German  

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