Materials & Process Integration for MEMS - Microsystems - Francis E H Tay - Books - Springer-Verlag New York Inc. - 9781402071751 - August 31, 2002
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Francis E H Tay
Materials & Process Integration for MEMS - Microsystems 2002 edition

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Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures.

299 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released August 31, 2002
ISBN13 9781402071751
Publishers Springer-Verlag New York Inc.
Pages 299
Dimensions 155 × 235 × 19 mm   ·   712 g
Language English  
Editor Tay, Francis E. H.

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