Materials & Process Integration for MEMS - Microsystems - Francis E H Tay - Books - Springer-Verlag New York Inc. - 9781441953032 - December 3, 2010
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Francis E H Tay
Materials & Process Integration for MEMS - Microsystems Softcover reprint of hardcover 1st ed. 2002 edition

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Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures.

328 pages, 176 black & white illustrations, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released December 3, 2010
ISBN13 9781441953032
Publishers Springer-Verlag New York Inc.
Pages 299
Dimensions 155 × 235 × 17 mm   ·   458 g
Language English  
Editor Tay, Francis E. H.

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